Regions of operation for mos capacitor with ptype sc. Deep depletion the previous discussions pertain to the condition when the gate voltage is ramped slowly, from accumulation condition to depletion and then to inversion condition. The capacitance of a mos structure is voltage dependent since the. Depending upon the value of gate voltage applied, the mos capacitor works in.
Berkeley ee143 f2010 lecture 22 1 electrical characteristics of mos devices the mos capacitor voltage components accumulation, depletion, inversion modes. For still higher magnitudes of bias vg mos capacitor. When the ramp rate is high, the inversion layer does not form and does not have time to equilibrate. Typical mos capacitors and transistors in ics today employ. Let us now look at our particular device mos capacitor with an ntype body substrate. Repeat the derivations yourself for ntype substrate.
On this channel you can get education and knowledge for general issues and topics. Electrical characteristics of mos devices the mos capacitor. V characterization of mos capacitors using the model 4200. Pdf cv characterization of mos capacitors on high resistivity. The mos capacitance can be treated as two capacitances in series, the oxide. This work reports on an investigation of capacitancevoltage cv measurement of metaloxidesemiconductor mos capacitors on high resistivity silicon hrs used as substrate for radiofrequency. Mos capacitor capacitor under bias for an ntype semiconductor. The mos capacitor consists of a metaloxidesemiconductor structure as illustrated by figure 6. Structure acts like a parallel plate capacitor piling holes up at the surface. The electrical characteristics of both n and p type gan metaloxide semiconductor mos capacitors utilizing plasmaenhanced cvdsio2 as the gate dielectric were measured. Pdf this work reports on an investigation of capacitancevoltage cv measurement of. Lane department of computer science and electrical engineering. The heart of this device is the mos capacitor, which we will study today.
This is where the volt age is negative enough that the. Voltage components accumulation, depletion, inversion modes effect of channel bias and substrate bias effect of gate oxide charges thresholdvoltage adjustment by implantation capacitance vs. At zero applied volt age, the bending of the energy bands is ideally determined by the difference in the work functions of the metal and the semiconductor. How the metaloxidesemiconductor layers form a capacitor, what charges are present where, and why we care.
For instance for a ptype substrate one finds that for a large negative voltage, vg, applied. The induced interface charge in the mos capacitor is closely linked to the shape of the electron energy bands of the semiconductor near the interface. Shown is the semiconductor substrate with a thin oxide layer and a top metal contact, referred to as the gate. The capacitance depends on the voltage mos capacitor is the series combination of the oxide and the voltage dependent semiconductor capacitances.
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